Nanopositioning Technologies: Fundamentals and Applications
Changhai Ru, Xinyu Liu, Yu Sun (eds.)This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
వర్గాలు:
సంవత్సరం:
2016
ముద్రణం:
1
ప్రచురణకర్త:
Springer International Publishing
భాష:
english
ISBN 10:
3319238531
ISBN 13:
9783319238531
ఫైల్:
PDF, 17.67 MB
IPFS:
,
english, 2016
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